Spectroscopic Ellipsometry Online

(Psi): The ratio of the amplitude change between two light components (parallel and perpendicular to the plane of incidence). Δcap delta (Delta): The phase difference between these two components.

A polarizer that sets the initial state of the light. The Sample: The thin film or bulk material being studied. Spectroscopic Ellipsometry

SE is an technique; it does not measure thickness directly. Instead, researchers use the measured Δcap delta (Psi): The ratio of the amplitude change between

Illuminating the Invisible: A Guide to Spectroscopic Ellipsometry Spectroscopic Ellipsometry